RESUMO
The spatial resolution of the electron backscatter diffraction signal is explored by Monte Carlo simulation for the sigma phase in steel at a typical instrumental set-up. In order to estimate the active volume corresponding to the diffracted electrons, the fraction of the backscattered electrons contributing to the diffraction signal was inferred by extrapolating the Kikuchi pattern contrast measured by other authors, as a function of the diffracted electron energy. In the resulting estimation, the contribution of the intrinsic incident beam size and the software capability to deconvolve patterns were included. A strong influence of the beam size on the lateral resolution was observed, resulting in 20nm for the aperture considered. For longitudinal and depth directions the resolutions obtained were 75nm and 16nm, respectively. The reliability of this last result is discussed in terms of the survey of the last large-angle deflection undergone by the backscattered electrons involved in the diffraction process. Bearing in mind the mean transversal resolution found, it was possible to detect small area grains of sigma phase by EBSD measurements, for a stabilized austenitic AISI 347 stainless steel under heat treatments, simulating post welding (40h at 600°C) and aging (284h at 484°C) effects-as usually occurring in nuclear reactor pressure vessels.
